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真空製程氣體分析儀 - HPR-30

Vacuum Process Gas Analyser - HPR-30


產品類型 / Product Type:




產品應用 / Application:


Vacuum Coating / Plasma Etching
Sputter Deposition
Contamination Studies
Base Pressure Fingerprint
Leak Detection / Virtual Leaks / desorption
Outgassing / Bakeout / Pump Performance
Chamber / Process gas contaminants


相關網址 / Link:



規格說明 / Specification:



  • Compact bench-top / mobile cart / console rack construction.

  • Direct re-entrant orifice with differential pumping for optimum sensitivity / response.

  • Continuous sampling from 1 mbar to 10-4 mbar.
    High Sensitivity (to 5 ppb), mass range options to 1000 amu.

  • Soft Ionisation for the analysis of complex organics / appearance MS studies.

  • Stability (less than ±0.5% height variation over 24 h).
    MASsoft control via RS232, RS485 or Ethernet LAN.

  • Pneumatic valve control for automatic operation with manual override and fail-safe isolator in case of power failure or overpressure.

  • Automated simultaneous data acquisition / analysis with local display alarm panels


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