真空製程氣體分析儀 - HPR-30

Vacuum Process Gas Analyser - HPR-30

 

產品類型 / Product Type:

 

氣體監控分析

 

產品應用 / Application:

 

CVD / PECVD / RIE / LPCVD / MOCVD
Vacuum Coating / Plasma Etching
Sputter Deposition
Contamination Studies
Base Pressure Fingerprint
Leak Detection / Virtual Leaks / desorption
Outgassing / Bakeout / Pump Performance
Chamber / Process gas contaminants

 

相關網址 / Link:

 

http://www.hidenanalytical.com/index.php/en/product-catalog/34-residual-gas-analysers/46-hpr-30-process-gas-analyser

 

 

規格說明 / Specification:

 

 

  • Compact bench-top / mobile cart / console rack construction.

  • Direct re-entrant orifice with differential pumping for optimum sensitivity / response.

  • Continuous sampling from 1 mbar to 10-4 mbar.
    High Sensitivity (to 5 ppb), mass range options to 1000 amu.

  • Soft Ionisation for the analysis of complex organics / appearance MS studies.

  • Stability (less than ±0.5% height variation over 24 h).
    MASsoft control via RS232, RS485 or Ethernet LAN.

  • Pneumatic valve control for automatic operation with manual override and fail-safe isolator in case of power failure or overpressure.

  • Automated simultaneous data acquisition / analysis with local display alarm panels