真空製程氣體分析儀 - HPR-30
Vacuum Process Gas Analyser - HPR-30
產品類型 / Product Type：
氣體監控分析
產品應用 / Application：
CVD / PECVD / RIE / LPCVD / MOCVD
Vacuum Coating / Plasma Etching
Sputter Deposition
Contamination Studies
Base Pressure Fingerprint
Leak Detection / Virtual Leaks / desorption
Outgassing / Bakeout / Pump Performance
Chamber / Process gas contaminants
相關網址 / Link：
規格說明 / Specification：
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Compact bench-top / mobile cart / console rack construction.
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Direct re-entrant orifice with differential pumping for optimum sensitivity / response.
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Continuous sampling from 1 mbar to 10-4 mbar.
High Sensitivity (to 5 ppb), mass range options to 1000 amu. -
Soft Ionisation for the analysis of complex organics / appearance MS studies.
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Stability (less than ±0.5% height variation over 24 h).
MASsoft control via RS232, RS485 or Ethernet LAN. -
Pneumatic valve control for automatic operation with manual override and fail-safe isolator in case of power failure or overpressure.
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Automated simultaneous data acquisition / analysis with local display alarm panels