殘餘氣體分析儀( RGA)

Residual Gas Analysers

 

產品類型 / Product Type:

 

氣體分析

 

產品應用 / Application:

 

殘餘氣體分析應用於真空檢測, 漏氣檢測, TPD及製程監控

 

相關網址 / Link:

 

http://www.hidenanalytical.com/index.php/en/product-catalog/34-residual-gas-analysers

 

規格說明 / Specification

 

  • High sensitivity helium leak detection, mass selectable for
    alternative search gases

  • Ultra-fast data acquisition - up to 500 measurements per
    second

  • Advanced analysis capability for complex gas interpretation

  • Data presentation as mass peak ratios for highest stability
    and accuracy

  • Twin burnout-resistant oxide coated iridium filaments

  • User-programmable multi-tasking firmware for creation of process-specific control and data acquisition functions