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殘餘氣體分析儀( RGA)

Residual Gas Analysers


產品類型 / Product Type:




產品應用 / Application:


殘餘氣體分析應用於真空檢測, 漏氣檢測, TPD及製程監控


相關網址 / Link:


規格說明 / Specification


  • High sensitivity helium leak detection, mass selectable for
    alternative search gases

  • Ultra-fast data acquisition - up to 500 measurements per

  • Advanced analysis capability for complex gas interpretation

  • Data presentation as mass peak ratios for highest stability
    and accuracy

  • Twin burnout-resistant oxide coated iridium filaments

  • User-programmable multi-tasking firmware for creation of process-specific control and data acquisition functions


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