殘餘氣體分析儀( RGA)

Residual Gas Analysers

 

產品類型 / Product Type：

 

氣體分析

 

產品應用 / Application：

 

殘餘氣體分析應用於真空檢測, 漏氣檢測, TPD及製程監控

 

相關網址 / Link：

 

http://www.hidenanalytical.com/index.php/en/product-catalog/34-residual-gas-analysers

 

規格說明 / Specification：

 

• High sensitivity helium leak detection, mass selectable for
  alternative search gases

• Ultra-fast data acquisition - up to 500 measurements per
  second

• Advanced analysis capability for complex gas interpretation

• Data presentation as mass peak ratios for highest stability
  and accuracy

• Twin burnout-resistant oxide coated iridium filaments

• User-programmable multi-tasking firmware for creation of process-specific control and data acquisition functions