Microwave plasma cleaning and descumming process is an advanced dry process, using common industrial gases as raw materials, such as oxygen, nitrogen, argon, carbon tetrafluoride and other gases. Its environmentally friendly and efficient cleaning and degumming process has been recognized and promoted by more and more industry users.
The main applications of Astro Plasma include but are not limited to the following:

1. Plasma descumming (aching)
2. Descum
3. MEMS sacrificial layer release
4. Plasma cleaning: dry removal of oxide or organic contamination residues on the surface of materials can greatly improve the quality of bonding WB and plastic molding in packaging process.
5. Surface activation or modification: for example, plasma surface activation treatment before wet etching can improve the wet etching effect and greatly improve the quality of bonding WB and plastic molding in packaging process.


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