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EPIC 四極質譜儀 /

EPIC Quadrupole mass spectrometers


產品類型 Product Type:


neutrals, radicals and ions之超高真空分析


產品應用 / Application:


Neutrals, Radicals, Positive & Negative ions.
Electron Attachment Studies.
Surface Science, Molecular Beam Studies.
UHV Temperature Programmed Desorption.
High Performance RGA.
Desorption / Outgassing studies / Bakeout cycles.
Chamber / Process gas Contaminants


相關網址 / Link:



規格說明 / Specification:



High Sensitivity, Enhanced detection from 100% to 5ppb.

Mass range options to 2500 amu, 6,9 or 12 mm pole diameter options.

Enhanced long-term Stability (less than ±0.5% height variation over 24 h).

Ion Energy distribution by mid-axis potential scanning ±100 V, 1000 eV Option.

Ion source control for soft ionisation and appearance potential mass spectrometry.

Enhanced sensitivity for high mass transmission, Automatic mass scale alignment.

Pulse Ion Counter for continuous 7 decade dynamic range, Faraday option to 5x1010

Enhanced contamination resistance via the RF-only pre-filter stage.

Signal gating 1µs resolution for energy & mass distributions vs time or TOF studies.

Temperature reading integrated into data displays for thermal desorption applications.

Integral UHV compatible shroud, Liquid Nitrogen cooled shroud option.

MASsoft control via RS232, RS485 or Ethernet LAN.

Upgradeable to Plasma / SIMS specification.


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