EQP - 電漿質譜儀 /
EQP – Mass and Energy Analyser


產品類型 / Product Type:


電漿檢測 / Plasma Analysers


產品應用 / Application:


EQP是質譜及能量分析儀, 可分析電漿製程中的正負離子, 中子及radicals

analysis of positive AND negative ions, neutrals, and radicals from plasma processes








1.Software controlled Ion Extraction Optics for minimum plasma perturbation.

2.45° Electrostatic Sector analyser, Scan Energy at 0.05 eV increments/ 0.25eV FWHM.

3.Minimum perturbation of ion flight path & constant ion transmission at all energies.

4.Differentially pumped Triple filter Quadrupole, mass range options to 2500amu.

5.High Sensitivity / Stability Pulse Ion Counting Detector with

7 decade dynamic range.

6.Tuneable integral ioniser for appearance potential MS with electron attachment option.

7.Penning Gauge and interlocks to provide over pressure protection.

8.Signal gating and programmable signal gating option for time resolved studies in pulsed plasma.

9.1000eV Option, Floating option up to 10keV, Faraday Cup for high density plasmas.

10.Mu-Metal, Radio-metal shielding options, high pressure operation option.

11.MASsoft control via RS232, RS485 or Ethernet LAN.