Heater Modules

 

產品類型 / Product Type:

 

vacuum component

 

產品應用 / Application:

 

相關網址 / Link:

 

 

http://www.uhvdesign.com/index.php?op=template5&pid=167&ln=english

 

 

規格說明 / Specification:

 

 

  • High uniformity heating to 1000°C (1200°C for certain applications)

  • Refractory metal hot zone

  • High performance PgG or PBN coated graphite elements

  • Quartz guard option for element protection 

 

UHV Design has developed a range of heater modules specifically for those customers wishing to incorporate a heating capability into their own heater stage. Our heater module range offers a cost-effective solution to heating requirements whilst using proven heater technology. 

UHV Design heater modules are used in vacuum applications for radiantly heating semiconductor wafers, holder supported samples or various other substrates to high temperatures. The modules feature CVD processed heating elements packaged in refractory metal cases.

 

The immediate hot zone holding the element is constructed from refractory metals such as molybdenum and tantalum and does not include any materials that would compromise performance at high temperature. These modules are therefore particularly suitable for ultra high vacuum applications.