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Large Sample SPM


產品類型 / Product Type:


Large Sample SPM


產品應用 / Application:


• 1\\\" to 4\\\" wafer samples
• 3-dimensional tip coarse positioning
• Remote controlled tip exchange
• Customized wafer handling


相關網址 / Link:



規格說明 / Specification:


The Large Sample UHV SPM (LS SPM) is designed for applications on semiconductor wafers from 1 to 4 inches in diameter. The microscope offers a wide scan range, atomic resolution capability, precision tip coarse positioning within an area of 10 x 10 mm2, and a safe, remote controlled tip exchange.


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