Large Sample SPM

 

產品類型 / Product Type:

 

Large Sample SPM

 

產品應用 / Application:

 

• 1\\\" to 4\\\" wafer samples
• 3-dimensional tip coarse positioning
• Remote controlled tip exchange
• Customized wafer handling

 

相關網址 / Link:

 

www.scientaomicron.com

 

 

規格說明 / Specification:

 

The Large Sample UHV SPM (LS SPM) is designed for applications on semiconductor wafers from 1 to 4 inches in diameter. The microscope offers a wide scan range, atomic resolution capability, precision tip coarse positioning within an area of 10 x 10 mm2, and a safe, remote controlled tip exchange.