top of page
Large Sample SPM
產品類型 / Product Type：
Large Sample SPM
產品應用 / Application：
• 1\\\" to 4\\\" wafer samples
• 3-dimensional tip coarse positioning
• Remote controlled tip exchange
• Customized wafer handling
相關網址 / Link：
規格說明 / Specification：
The Large Sample UHV SPM (LS SPM) is designed for applications on semiconductor wafers from 1 to 4 inches in diameter. The microscope offers a wide scan range, atomic resolution capability, precision tip coarse positioning within an area of 10 x 10 mm2, and a safe, remote controlled tip exchange.
bottom of page