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SmarAct

SMARPROBE Etch

NanoProber

The Nanoprober SMARPROBE was developed to take nanometer-resolved closed-loop probing to the next level in respect to efficiency and stability. It allows the positioning of up to eight probes to analyze or manipulate samples fixed onto its sample stage. The system integrates into an electron microscope for failure analysis of i.e. 5 nm transistors or into an optical microscope setup for atmospheric probing of large samples.

https://www.smaract.com/en/nano-probing

Brand

With the automated SMARPROBE etching station you can make your own probing tips which saves costs and time. The etching process can be configured via the control software to obtain the desired probe geometry and tip sharpness so that you can create the perfect tip for every task. The unique progress-tracking of the etching process and the high-speed drop-off detection guarantees that you get reproducible results with the desired tip radius.

Application

Specification

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