top of page

SmarAct

SMARPROBE SP4 & SP8

NanoProber

The Nanoprober SMARPROBE was developed to take nanometer-resolved closed-loop probing to the next level in respect to efficiency and stability. It allows the positioning of up to eight probes to analyze or manipulate samples fixed onto its sample stage. The system integrates into an electron microscope for failure analysis of i.e. 5 nm transistors or into an optical microscope setup for atmospheric probing of large samples.

https://www.smaract.com/en/nano-probing

Brand

The SMARPROBE SP4 is a probing system with up to 4 manipulators while the SMARPROBE SP8 comes with up to 8 manipulators.
Each of the manipulators has 3 degrees of freedom and is equipped with nanometer-resolution optical encoders for high precision electrical probing.
Smart positioning routines implemented in the dedicated control software and the ability to load up to four SEM sample stubs increase operating ease and overall throughput of any nano-probing task.

Application

Specification

bottom of page