Sonosys
Megasonic Tanks
SONOSYS® offers solutions in the field of ultrasonic and megasonic cleaning for various applications. The focus hereby is on higher frequencies (between 400 kHz and 5 MHz) for cleaning the smallest particles and contaminants, right down to the nanometer range. The megasonic products are developed entirely in-house and range from the generator and transducer plates with patented piezo ceramics up to submersible transducers and single and dual nozzles. After its founding in 1995 the R&D and production was scaled up continuously to a wide product portfolio and to become a European leader in Megasonics technology.
Brand
Tank according to needs
There is a variety of tanks used in wet processes, e.g. in VA (stainless steel) or PVDF. The integration of the transducer plate is done by screwing in or welding and hence becomes an integral part of the tank. In the tank design process a cutout for the transducer plate is foreseen and later practically integrated at SONOSYS® finally.
The requirements of the used medium (chemicals) usually define which material is used both for the tank and the coating of the Megasonic transducer. We are glad to offer you counceling around the topic of how to select the right material and integration method, please feel free to reach out to us.
Example application:
The Megasonic system has been developed especially for wet processes in the semiconductor wafer production. With a focus on SC1 and SC2 processes, as well as final rinse, a temperature range or approx. 20C to 70C is covered (up to 300m/12" wafer).