Sonosys
Submersible Transducer
SONOSYS® offers solutions in the field of ultrasonic and megasonic cleaning for various applications. The focus hereby is on higher frequencies (between 400 kHz and 5 MHz) for cleaning the smallest particles and contaminants, right down to the nanometer range. The megasonic products are developed entirely in-house and range from the generator and transducer plates with patented piezo ceramics up to submersible transducers and single and dual nozzles. After its founding in 1995 the R&D and production was scaled up continuously to a wide product portfolio and to become a European leader in Megasonics technology.
Brand
Retrofit flexibly and cost-effectively with Submersible Transducers 400 kHz + 600 kHz / 1 MHz + 2 MHz
The submersible transducers are encapsulated transducers made of stainless steel or plastics (e.g.: PVDF or PFA) to be positioned at the bottom or at the side wall of an existing tank. Besides the standard systems for 4", 6" and 8" substrates, custom specific solutions are offered.
This flexible configuration allows a convenient retrofit with a Megasonic system in an existing tank. The submersible transduceres are available with the frequencies of 400 kHz / 600 kHz / 1 MHz / 2 MHz. The extremely uniform energy transmission ensures a hitherto-unachieved cleaning performance, while at the same time providing the best protection of the micro- and nano-structures. All over the world, SONOSYS® stands for unique and future-proof solutions. Unique in the world: our transducer systems, with patent-pending piezo-ceramics, achieve a 40% higher sound pressure or an up to 30% higher efficiency compared to a traditional system.
Application:
Cleaning of substrates, semiconductor wafers, photo-masks, micro parts and micro systems (MEMS) up to 200 mm. Photoresist removal within the LIGA - technology, as well as etching processes.