Sonosys
Transducer-Plates
SONOSYS® offers solutions in the field of ultrasonic and megasonic cleaning for various applications. The focus hereby is on higher frequencies (between 400 kHz and 5 MHz) for cleaning the smallest particles and contaminants, right down to the nanometer range. The megasonic products are developed entirely in-house and range from the generator and transducer plates with patented piezo ceramics up to submersible transducers and single and dual nozzles. After its founding in 1995 the R&D and production was scaled up continuously to a wide product portfolio and to become a European leader in Megasonics technology.
Brand
Customized solutions for assembly in process tanks made of stainless steel and plastic
Transducer plates made of stainless steel are available for bottom (or side wall) mounting in a plastic or stainless-steel tank. For the use in plastic process tanks a PFA coating of the transducer can be offered.
The available standard sizes are for 4" / 6" / 8" and 12" substrates, but can be also customized to different sizes. For this, the cut out area in the bottom of the tank is defined together and the transducer can then be mounted by screwing-in or welding-in. This way, a seamless and compact integration is possible.
Application:
Cleaning of substrates and semiconductor wafers with 100 mm, 150 mm, 200 mm and 300 mm in Single- or Dual-Carrier.