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四極質譜儀 /

Triple Filter Quadrupole Mass Spectrometers


產品類型 / Product Type:




產品應用 Application:


Surface Science
Molecular Beam Studies
UHV Temperature Programmed Desorption
High Performance RGA
Cluster Studies
Leak Detection / Virtual Leaks
Desorption / Outgassing studies / Bakeout cycles
Chamber / Process gas Contaminants


相關網址 / Link:



規格說明 / Specification:


  • High Sensitivity, enhanced detection from 100% to 5ppb.

  • Mass range options to 2500 amu with Automatic mass scale alignment.

  • Enhanced long-term Stability (less than ±0.5% height variation over 24 h).

  • Ion source control for soft ionisation and appearance potential mass spectrometry.

  • Enhanced sensitivity for high mass transmission, 6, 9 or 12 mm pole diameter options.

  • Available with a wide choice of integral ioniser configurations, e.g. low profile, XBS.

  • Enhanced contamination resistance via the RF-only pre-filter stage.

  • Temperature reading integrated into data displays for thermal desorption applications.

  • Pulse Ion Counter detector option for continuous 7 decade dynamic range.

  • MASsoft control via RS232, RS485 or Ethernet LAN.


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