Turbo-Pumped Thermal Evaporator
產品類型 / Product Type：
高真空双靶源熱蒸度系統 / Turbo-Pumped Thermal Evaporator
產品應用 / Application：
相關網址 / Link：
規格說明 / Specification：
The K975X is fitted with a carbon rod gun and metal filament/boat source which can also be used for cleaning TEM and SEM apertures. An optional sputtering source is available.
Fitted with an 80mm flat stage as standard, but this may be exchanged for optional holders, such as a 3mm grid holder, low-angle shadowing attachment and a rotary planetary stage (see Options and Accessories). Specimen holders are supplied with a bayonet fixing for quick removal.
The rotary stage is mounted on a sliding access port on the side of the chamber. This allows the user to exchange specimens quickly without having to remove the glass chamber and disturb any coating set-up. The standard flat stage may be tilted for rotary shadowing techniques from 0° to +/- 180°.