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XBS Triple Filter Mass Spectrometer


產品類型 Product Type:


XBS Triple Filter Quadrupoles configured for multiple source monitoring in MBE deposition applications. The custom configured ioniser provides for high stability, high senstivity monitoring of oxides and metals from both k-cell and e-gun sources


產品應用 / Application:


MBE monitoring and control.
Molecular Beam Studies.
Multiple beam source analysis.
High Performance RGA.
Desorption / Outgassing studies / Bakeout cycles.
Chamber / Process gas Contaminants


相關網址 / Link:


規格說明 / Specification:



  • High Sensitivity, Enhanced detection from 100% to 5ppb, mass range to 510 amu.
    Enhanced long-term Stability (less than ±0.5% height variation over 24 h).
    Crossbeam ion source, beam acceptance through +/- 35° to transverse axis.
    Ion source control for soft ionisation and appearance potential mass spectrometry.
    Enhanced sensitivity for high mass transmission, Automatic mass scale alignment.
    2mm beam acceptance aperture – configured to specific user application.
    Enhanced contamination resistance via the RF-only pre-filter stage.
    Integral UHV compatible water-cooled shroud.
    Detection limits down to 30 ions / s in molecular beam studies.
    Monitor growth rates of 1Å / min and lower.
    Windows™ based MASsoft control via RS232, RS485 or Ethernet LAN


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